The Innovation Center for Quantum Optics and Sensors offers a broad research infrastructure for quantum optics and sensing technologies.

Quantum optics research infrastructure

Contact: Prof. Andreas Tünnermann,

© Jan-Peter Kasper / FSU

The quantum optics research infrastructure is focused on prototyping and device characterization. It is mainly provided by the Abbe Center of Photonics and located at the ACP research building and its participating institutes. These facilities cover light sources of various wavelengths and intensities, equipment for measuring all properties of light as well as state-of-the-art systems for nano- and microstructuring.

In particular, the InQuoSens equipment includes:

  • Laser sources with very high intensities and ultrashort pulse durations,
  • Instruments for generating and measuring extreme wavelengths,
  • Single-photon detection technology,
  • Spectroscopic and microscopic measuring equipment for a wide range of applications,
  • Equipment for the production and characterization of optical fibers,
  • more than 1,400 m² cleanroom area for processing and structuring of optical components,
  • a broad range of equipment for the nanostructuring of various materials,
  • Equipment for lithographically controlled chemical synthesis,
  • Tools for the characterization of biophotonic phenomena.

These research facilities are available to all scientists involved in the ACP, as well as to regularly visiting researchers. They are operated by the highly specialized and experienced scientists and technical staff of the institutions involved in the ACP in order to carry out scientific work on both fundamental and applied topics at the highest level.

Sensing technology infrastructure

Contact: Prof. Jens Müller,

© Jan-Peter Kasper / FSU

Members of the IMN MacroNano® as well as external users like scientists from other research institutions are benefiting from a total of more than 2,000 m² of modern and appropriately equipped laboratory space with 1,200 m² cleanroom area at the Technical University Ilmenau. The plants and devices are maintained by and located in the infrastructural technological platform of the institute, the Center of Micro- and Nanotechnology. Granted as a core facility by the German Research Foundation, the Center guarantees the easy access for internal as well as the external users. InQuoSens can rely on cleanrooms of different classes (5-7) as well as powder-controlled specialized laboratories like biological laboratories with protection class 1, analytical laboratories (partially fault minimized), laboratories for laser- and ultrahigh precision processing and laboratories for printed circuit board manufacture and electrochemical processes.

For processing scientific topics, the over 200 different plants and devices of the Center are comprised in specific process lines:

  • 3D nanostructuring (large-area nanostructures) (ALD, NIL, etc.),
  • small-area and singular nanostructures (e-beam lithography, FIB, etc.),
  • silicon-based MEMS and NEMS (UV lithography, plasma etching systems (RIE, ICP, ECR), advanced deep silicon etching),
  • systems based on metal and semiconductor thin films (MBE, PVD, CVD, MOCVD, PECVD, LPCVD, atmospheric oxidation batch system),
  • ceramics-based microsystems (LTCC technology).

Corresponding to the process engineering equipment a broad analytical equipment is available, which offers comprehensive possibilities for process-accompanying analyzes up to basic materials-analytical investigations:

  • material- and nanoanalytics (e.g. AES, REM, TEM, FIB, XRD, PECS, AFM, EPR),
  • physical-optical analysis (e.g. LSM, (optical) UV-Vis, RAMAN, profilometer, ellipsometry, white-light interference microscope),
  • electrical characterization (e.g. surface resistance, conductivity, bandgap)
  • biological and chemical analytics (e.g. ICP-MS, fluorescence spectroscopy, photometry)

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